At Sanxin, we’ve been reach that the industrialization of diamond disk and produced a number of series for different CMP process, such as oxide, copper, tungsten and STI, especially application of WCMP & ECMP. Our new product would develop soon for application of soft pad as Supa800, the diamond disk with blush.

• 『3D空間排列』專利技術具多樣化粗糙度，縮短CMP研發調校時程；均勻承壓的細緻性粗糙磨面，活化拋光墊功能。

• 創新布置鑽石專利技術，最佳鑽石分佈以調節特定拋光墊的粗糙度。

• 採低溫樹脂固化製程確保鑽石結構強度與精確篩選機制確保鑽石粘黏強度，徹底去除低強度鑽石刀刃部位以避免鑽石掉粒現象。

• 延長拋光墊壽命及維持高效率穩定特性，CMP作業穩定順暢，創造極高效率、遽降生產成本、提升設備稼動率。

• ​特別應用在WCMP 和 ECMP 製程是完全不受酸腐蝕與金屬離子污染的解決方案。